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Materials Science of Microelectromechanical Systems (MEMS) Devices Ⅲ: Symposiumheld November 27-28, 2000, Boston, Massachusetts, U.S.A.; MRS Vol.657 Vol.657 Vol.657 
Creator: editors, Harold Kahn, Maarten de Boer, Michael Judy [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2001)
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| Number: | Volume number: Vol.657 |
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Volume
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| Language: | English |
| Physical description: | 24 |
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| Identifier: | ISBN: 9781558995673 ISSN: 02729172 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 219096 | Sengen |
Proceedings 26 
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MRS|P|11623 | Available On Shelf |