Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

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editors, Harold Kahn ... [et al.]
Creator: Kahn, Harold Publisher: Materials Research Society (Date of publication: 2001)

Titlte alternative:	Materials science of microelectromechanical systems (MEMS) devices 3
Series statement:	Materials Research Society symposium proceedings v. 657 (ISSN: 02729172)
Form:	Volume
Language:	English
Physical description:	1 v. ; 24 cm
Subject:
Classification:	UDC: MRS
Tag:
Identifier:	ISBN: 9781558995673 ISSN: 02729172 NCID: BA54946961
Abstract:
Note:	Includes bibliographical references and indexes

Item identifier	Library	Shelf	Call number	Circulation status
219096	Namiki	Journal Archives 60	MRS\|P\|657	Available On Shelf

Namiki
Journal Archives 60
Available On Shelf

MRS

657