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Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. 
editors, Mark I. Gardner ... [et al.]
Creator: Gardner, Mark I. Materials Research Society Publisher: Materials Research Society (Date of publication: 2003)
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Volume
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| Language: | English |
| Physical description: | xiii, 384 p. ; 24 cm |
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ISBN: 9781558996823
NCID: BA62180845
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 219502 | Namiki |
Journal Archives 60 
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MRS|P|745 | Available On Shelf |