[M] Journal of Vacuum Science & Technology A Vol.13 No.3(2)-4 Vol.13 No.3(2)-4

Publisher: for The American Vacuum Society by the American Institute of Physics (Date of publication: 1995)

• Detail

Periodical:	Journal of Vacuum Science & Technology A
Edition:
Number:	Volume number: Vol.13 Issue number: No.3(2)-4
Form:	Volume
Language:	English
Physical description:	1217p; 29cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 07342101
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
128299	Sengen	Journal Archives	|J|22142	Available On Shelf Not For Loan