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[M] Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. Volume

editors, Duane S. Boning ... [et al.]
Creator: Publisher: Materials Research Society (Date of publication: 2004)

Series statement:
  • Materials Research Society symposium proceedings v. 816
Form: Volume Volume
Language: English
Physical description: xi, 292 p. ; 24 cm
Subject:
Classification:
Tag:
Identifier: ISBN: 9781558997660
Abstract:

Note:

Includes bibliographical references and indexes

Item identifier Library Shelf Call number Circulation status
219682 Namiki Journal Archives 60 Picture MRS|P|816 Available On Shelf