[M] Journal of Vacuum Science & Technology B Vol.21 No.4-6

Publisher: American Vacuum Society (Date of publication: 2003)

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Periodical:	Journal of Vacuum Science & Technology B
Edition:
Number:	Volume number: Vol.21 Issue number: No.4-6
Form:	Volume
Language:	English
Physical description:	1187p; 28cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 0734211X
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
131460	Sengen	Journal Archives	||27272	Available On Shelf Not For Loan

• [M] Journal of Vacuum Science & Technology B