[M] Journal of Vacuum Science & Technology B Vol.20 No.1-3

Publisher: American Vacuum Society (Date of publication: 2002)

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Periodical:	Journal of Vacuum Science & Technology B
Edition:
Number:	Volume number: Vol.20 Issue number: No.1-3
Form:	Volume
Language:	English
Physical description:	1p; 29cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 0734211X
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
130796	Sengen	Journal Archives	||26608	Available On Shelf Not For Loan

• [M] Journal of Vacuum Science & Technology B