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Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing : Special topic volume Selected papers from RTP specialists all over the world Dornstadt, Germany Vols.573-574 Vols.573-574 
Creator: Guest Editors: W. Lerch and J. Niess Publisher: Trans Tech Publications (TTP)
(Date of publication: 2008)
| Periodical: | Materials Science Forum |
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| Number: | Volume number: Vols.573-574 |
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Volume
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| Language: | English |
| Physical description: | 432p; 25cm |
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| Identifier: | ISSN: 02555476 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 133838 | Namiki |
Journal Archives 28 
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|M|29651 |
Available On Shelf Not For Loan |
