【並木】＜年次:1964-1982＞Vol.1-21

【配架場所】並木 集密書庫27
継続後誌：Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
継続後誌：Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society