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[M] Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Serial Volume


Publisher: American Institute of Physics

Titlte alternative J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena
ISSN 0734211X
NCID AA10635106
Holding information

【並木】＜年次:1983-1990＞Vol.1-8

Note

【配架場所】並木 集密書庫27
継続前誌：Journal of vacuum science and technology
継続後誌：Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

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71 Journal of Vacuum Science & Technology B 3 1-3 Volume
(1985)
Item identifier Library Shelf Call number Circulation status
512092 Namiki Journal Archives 27 Picture ||11773 Available On Shelf
Not For Loan
72 Journal of Vacuum Science & Technology B 3 4-6 Volume
(1985)
Item identifier Library Shelf Call number Circulation status
512093 Namiki Journal Archives 27 Picture ||11774 Available On Shelf
Not For Loan
73 Journal of Vacuum Science & Technology B 2 1-4 Volume
(1984)
Item identifier Library Shelf Call number Circulation status
512091 Namiki Journal Archives 27 Picture ||11146 Available On Shelf
Not For Loan
74 Journal of Vacuum Science & Technology B 1 1-4 Volume
(1983)
Item identifier Library Shelf Call number Circulation status
512090 Namiki Journal Archives 27 Picture ||10581 Available On Shelf
Not For Loan