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[M] Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Serial Volume


Publisher: American Institute of Physics

Titlte alternative J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena
ISSN 0734211X
NCID AA10635106
Holding information

【並木】<年次:1983-1990>Vol.1-8

Note

【配架場所】並木 集密書庫27
継続前誌:Journal of vacuum science and technology
継続後誌:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

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(1995)
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48 Journal of Vacuum Science & Technology B 13 3-4 Volume
(1995)
Item identifier Library Shelf Call number Circulation status
512144 Namiki Journal Archives 27 Picture ||17647 Available On Shelf
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49 Journal of Vacuum Science & Technology B 13 5-6 Volume
(1995)
Item identifier Library Shelf Call number Circulation status
512145 Namiki Journal Archives 27 Picture ||17648 Available On Shelf
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50 Journal of Vacuum Science & Technology B 12 1-2 Volume
(1994)
Item identifier Library Shelf Call number Circulation status
512140 Namiki Journal Archives 27 Picture ||16948 Available On Shelf
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