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[M] Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Serial Volume


Publisher: American Institute of Physics

Titlte alternative J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena
ISSN 0734211X
NCID AA10635106
Holding information

【並木】＜年次:1983-1990＞Vol.1-8

Note

【配架場所】並木 集密書庫27
継続前誌：Journal of vacuum science and technology
継続後誌：Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

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11 Journal of Vacuum Science & Technology B 14 3-4 Volume
(1996)
Item identifier Library Shelf Call number Circulation status
512147 Namiki Journal Archives 27 Picture ||18260 Available On Shelf
Not For Loan
12 Journal of Vacuum Science & Technology B 14 5-6 Volume
(1996)
Item identifier Library Shelf Call number Circulation status
512148 Namiki Journal Archives 27 Picture ||18261 Available On Shelf
Not For Loan
13 Journal of Vacuum Science & Technology B 13 1-2 Volume
(1995)
Item identifier Library Shelf Call number Circulation status
512143 Namiki Journal Archives 27 Picture ||17646 Available On Shelf
Not For Loan
14 Journal of Vacuum Science & Technology B 13 3-4 Volume
(1995)
Item identifier Library Shelf Call number Circulation status
512144 Namiki Journal Archives 27 Picture ||17647 Available On Shelf
Not For Loan
15 Journal of Vacuum Science & Technology B 13 5-6 Volume
(1995)
Item identifier Library Shelf Call number Circulation status
512145 Namiki Journal Archives 27 Picture ||17648 Available On Shelf
Not For Loan
16 Journal of Vacuum Science & Technology B 12 1-2 Volume
(1994)
Item identifier Library Shelf Call number Circulation status
512140 Namiki Journal Archives 27 Picture ||16948 Available On Shelf
Not For Loan
17 Journal of Vacuum Science & Technology B 12 3-4 Volume
(1994)
Item identifier Library Shelf Call number Circulation status
512141 Namiki Journal Archives 27 Picture ||16949 Available On Shelf
Not For Loan
18 Journal of Vacuum Science & Technology B 12 5-6 Volume
(1994)
Item identifier Library Shelf Call number Circulation status
512142 Namiki Journal Archives 27 Picture ||16950 Available On Shelf
Not For Loan
19 Journal of Vacuum Science & Technology B 11 1-3 Volume
(1993)
Item identifier Library Shelf Call number Circulation status
512138 Namiki Journal Archives 27 Picture ||16463 Available On Shelf
Not For Loan
20 Journal of Vacuum Science & Technology B 11 4-6 Volume
(1993)
Item identifier Library Shelf Call number Circulation status
512139 Namiki Journal Archives 27 Picture ||16464 Available On Shelf
Not For Loan

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