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[M] Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Serial Volume


Publisher: American Institute of Physics

Titlte alternative J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena
ISSN 0734211X
NCID AA10635106
Holding information

【並木】＜年次:1983-1990＞Vol.1-8

Note

【配架場所】並木 集密書庫27
継続前誌：Journal of vacuum science and technology
継続後誌：Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

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1 Journal of Vacuum Science & Technology B 17 6 Volume
(1999)
Item identifier Library Shelf Call number Circulation status
512155 Namiki Journal Archives 27 Picture ||20088 Available On Shelf
Not For Loan
2 Journal of Vacuum Science & Technology B 17 1-3 Volume
(1999)
Item identifier Library Shelf Call number Circulation status
512156 Namiki Journal Archives 27 Picture ||20086 Available On Shelf
Not For Loan
3 Journal of Vacuum Science & Technology B 17 4-5 Volume
(1999)
Item identifier Library Shelf Call number Circulation status
512157 Namiki Journal Archives 27 Picture ||20087 Available On Shelf
Not For Loan
4 Journal of Vacuum Science & Technology B 16 1-2 Volume
(1998)
Item identifier Library Shelf Call number Circulation status
512152 Namiki Journal Archives 27 Picture ||19628 Available On Shelf
Not For Loan
5 Journal of Vacuum Science & Technology B 16 3-4 Volume
(1998)
Item identifier Library Shelf Call number Circulation status
512153 Namiki Journal Archives 27 Picture ||19629 Available On Shelf
Not For Loan
6 Journal of Vacuum Science & Technology B 16 5-6 Volume
(1998)
Item identifier Library Shelf Call number Circulation status
512154 Namiki Journal Archives 27 Picture ||19630 Available On Shelf
Not For Loan
7 Journal of Vacuum Science & Technology B 15 1-3 Volume
(1997)
Item identifier Library Shelf Call number Circulation status
512150 Namiki Journal Archives 27 Picture ||18806 Available On Shelf
Not For Loan
8 Journal of Vacuum Science & Technology B 15 4-5 Volume
(1997)
Item identifier Library Shelf Call number Circulation status
512151 Namiki Journal Archives 27 Picture ||18807 Available On Shelf
Not For Loan
9 Journal of Vacuum Science & Technology B 15 6 Volume
(1997)
Item identifier Library Shelf Call number Circulation status
512149 Namiki Journal Archives 27 Picture ||18808 Available On Shelf
Not For Loan
10 Journal of Vacuum Science & Technology B 14 1-2 Volume
(1996)
Item identifier Library Shelf Call number Circulation status
512146 Namiki Journal Archives 27 Picture ||18259 Available On Shelf
Not For Loan

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