資料の表示
[M]
Journal of Vacuum Science & Technology. 2nd series. A, Vacuum, Surfaces, and Films 27(1-3) 
出版者: American Vacuum Society American Institute of Physics
(出版日: 2009)
| 定期刊行物: | Journal of Vacuum Science & Technology A |
|---|---|
| 版: | |
| 巻号: | 巻: 27(1-3) |
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | 29 |
| 件名: | |
| 分類: | |
| タグ: |
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| 識別子: | ISSN: 07342101 |
| アブストラクト: | |
| 注記: |
