[M] Journal of Vacuum Science & Technology. Second series. B, Microelectronics and Nanometer Structures, Processing, Measurement and Phenomena 27(1-2)

Publisher: American Vacuum Society American Institute of Physics (Date of publication: 2009)

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Periodical:	Journal of Vacuum Science & Technology B
Edition:
Number:	Volume number: 27(1-2)
Form:	Volume
Language:	English
Physical description:	29
Subject:
Classification:
Tag:
Identifier:	ISSN: 0734211X
Abstract:
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Item identifier	Library	Shelf	Call number	Circulation status
134676	Sengen	Journal Archives	||30489	Available On Shelf

• [M] Journal of Vacuum Science & Technology B

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