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Journal of Vacuum Science & Technology. Second series. B, Microelectronics and Nanometer Structures, Processing, Measurement and Phenomena 27(6) 
Publisher: American Vacuum Society American Institute of Physics
(Date of publication: 2009)
| Periodical: | Journal of Vacuum Science & Technology B |
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| Edition: | |
| Number: | Volume number: 27(6) |
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Volume
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| Language: | English |
| Physical description: | 29 |
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| Identifier: | ISSN: 0734211X |
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| Note: |
| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 134678 | Namiki |
Journal Archives 27 
|
||30491 | Available On Shelf |
