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1	Micromachined Thin-Film Sensors for SOI-CMOS CO-Integration by J. Laconte, D. Flandre, J.-P. Raskin Springer (2006-01-01) UDC: 538.975 Item identifier Library Shelf Call number Circulation status 210907 Namiki Books 10 538.975|L|ｷ1525 Available On Shelf

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