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| 1 |
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
ISSN:
15531813 07342101
Holding information: 【並木】<年次:1983-2013>Vol.1-31 |
| 2 |
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
ISSN:
0734211X
Holding information: 【並木】<年次:1983-1990>Vol.1-8 |
| 3 |
Journal of vacuum science and technology
ISSN:
00225355
Holding information: 【並木】<年次:1964-1982>Vol.1-21 |