[M] Carbon nanotube growth from catalyst nanoparticles injected into holes for LSI interconneｃｔｓ

Creator: External Organizations Nihei, Misuhisa Kawabata, Akio Kondo, Daiyu Awano, Yuji (Date of publication: 2005)
https://hdl.handle.net/20.500.11932/1402546

Manifestation: Carbon nanotube growth from catalyst nanoparticles injected into holes for LSI interconneｃｔｓ

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Created at: Mon, 31 Jul 2023 14:44:41 +0900

Updated at: Mon, 31 Jul 2023 14:44:41 +0900