[M] Chemical physics of thin film deposition processes for micro- and nano-technologies

edited by Yves Pauleau
Creator: Pauleau, Y. Publisher: Kluwer Academic (Date of publication: 2002)

Manifestation: Chemical physics of thin film deposition processes for micro- and nano-technologies

Shelf: Books 11 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 539.216|P|

Register number:

Item identifier: 602722

Include supplements: No

Required role: Guest

Acquired at: January 21, 2016

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Accepted at:

Created at: Tue, 16 Jan 2024 11:19:49 +0900

Updated at: Mon, 15 Dec 2025 09:33:01 +0900