[M] Handbook of sputter deposition technology : principles, technology, and applications

by Kiyotaka Wasa and Shigeru Hayakawa
Creator: Wasa, Kiyotaka Hayakawa, Shigeru Publisher: Noyes Publications (Date of publication: 1992)

Manifestation: Handbook of sputter deposition technology : principles, technology, and applications

Shelf: Books 11 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 539.23|W|

Register number:

Item identifier: 602736

Include supplements: No

Required role: Guest

Acquired at: December 20, 2015

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Created at: Tue, 16 Jan 2024 11:19:54 +0900

Updated at: Mon, 15 Dec 2025 09:33:06 +0900