[M] Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991

editors, M. Kittler and H. Richter
著者: International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology Kittler, M. Richter, H. 出版者: Sci-Tech Publications (出版日: 1991)

資料: Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991

本棚: 集密書庫8 (並木)

貸出区分: 標準

貸出状態: 在架（利用可能）

請求記号: 548.526|Ｋ|

原簿番号:

所蔵情報ID: 210615

付録を含む: いいえ

閲覧に必要な権限: Guest

受入日: 1992年04月21日

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作成時刻: 2010/12/15 23:18:13

更新時刻: 2025/12/15 09:52:42