資料の表示
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Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991 
editors, M. Kittler and H. Richter
著者: International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology Kittler, M. Richter, H. 出版者: Sci-Tech Publications (出版日: 1991)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | 650 p. ; 25 cm |
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NCID: BA13437989
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