[M] Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

editors, H.G. Grimmeiss, M. Kittler and H. Richter
Creator: International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology Grimmeiss, H. G. Kittler, M. Richter, H. Publisher: SciTec Publications (Date of publication: 1993)

Manifestation: Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

Shelf: Journal Archives 8 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 548.526||

Register number:

Item identifier: 216431

Include supplements: No

Required role: Guest

Acquired at: December 09, 1993

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Accepted at:

Created at: Wed, 15 Dec 2010 23:26:55 +0900

Updated at: Mon, 15 Dec 2025 09:52:43 +0900