[M] Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

editors, H.G. Grimmeiss, M. Kittler and H. Richter
著者: International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology Grimmeiss, H. G. Kittler, M. Richter, H. 出版者: SciTec Publications (出版日: 1993)

資料: Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

本棚: 集密書庫8 (並木)

貸出区分: 標準

貸出状態: 在架（利用可能）

請求記号: 548.526||

原簿番号:

所蔵情報ID: 216431

付録を含む: いいえ

閲覧に必要な権限: Guest

受入日: 1993年12月09日

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作成時刻: 2010/12/15 23:26:55

更新時刻: 2025/12/15 09:52:43