[M] Handbook of thin film process technology

editors, David A. Glocker, S. Ismat Shah
Creator: Glocker, David A. Shah, S. Ismat Publisher: Institute of Physics Pub. (Date of publication: 1995)

Manifestation: Handbook of thin film process technology

Shelf: Reference Books 3 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: (03)539.||05234

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Item identifier: 523100

Include supplements: No

Required role: Guest

Acquired at: October 17, 1995

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Accepted at:

Created at: Wed, 15 Dec 2010 20:31:42 +0900

Updated at: Mon, 15 Dec 2025 09:23:33 +0900