[M] Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.

editors, Nichoals E.B. Cowern ... [et al.]
Creator: Cowern, Nicholas E. B. Publisher: Materials Research Society (Date of publication: 1998)

Manifestation: Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|532

Register number:

Item identifier: 217932

Include supplements: No

Required role: Guest

Acquired at: December 25, 1998

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:37:00 +0900

Updated at: Wed, 03 Dec 2025 16:34:32 +0900