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[M] Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A. Volume

editors, Nichoals E.B. Cowern ... [et al.]
Creator: Publisher: Materials Research Society (Date of publication: 1998)

Series statement:
  • Materials Research Society symposium proceedings v. 532
Form: Volume Volume
Language: English
Physical description: xi, 228 p. ; 24 cm
Subject:
Classification:
Tag:
Identifier: ISBN: 9781558994386
Abstract:

Note:

Includes bibliographical references and index

Item identifier Library Shelf Call number Circulation status
217932 Namiki Journal Archives 60 Picture MRS|P|532 Available On Shelf