[M] Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.

editors, Hans-Joachim L. Gossmann ... [et al.]
Creator: Gossmann, Hans-Joachim L. Publisher: Materials Research Society (Date of publication: 1999)

Manifestation: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|568

Register number:

Item identifier: 218344

Include supplements: No

Required role: Guest

Acquired at: May 25, 2000

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:37:05 +0900

Updated at: Wed, 03 Dec 2025 16:34:35 +0900