[M] Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998

editors. M. Kittler, O. Breitenstein, A. Endros and W. Schroter
Creator: Kittler, M. Breitenstein, O. Publisher: Scitec Publications Ltd. (Date of publication: 1998)

Manifestation: Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998

Shelf: Journal Archives 8 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 548.526|Ｄ|10776

Register number:

Item identifier: 217984

Include supplements: No

Required role: Guest

Acquired at: February 17, 1999

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Created at: Wed, 15 Dec 2010 23:38:04 +0900

Updated at: Mon, 15 Dec 2025 09:52:44 +0900