[M] Chemical Vapor Deposition of Tungsten and Tungsten Silicides : For VLSI/ULSI Applications Technology

Creator: by John E.J. Schmitz Publisher: Noyes Publications (Date of publication: 1992-01-01)

Manifestation: Chemical Vapor Deposition of Tungsten and Tungsten Silicides : For VLSI/ULSI Applications

Shelf: Books 24 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 661.8...|S|11502

Register number:

Item identifier: 218914

Include supplements: No

Required role: Guest

Acquired at: July 25, 2001

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:38:58 +0900

Updated at: Mon, 15 Dec 2025 09:46:47 +0900