[M] Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.

editors, Erin C. Jones ... [et al.]
Creator: Jones, Erin C. Jones, Kevin S. Giles, Martin D. Stolk, Peter Matsuo, Jiro Publisher: Materials Research Society (Date of publication: 2001)

Manifestation: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|669

Register number:

Item identifier: 219169

Include supplements: No

Required role: Guest

Acquired at: May 15, 2002

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:43:00 +0900

Updated at: Wed, 03 Dec 2025 16:34:44 +0900