[M] Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.

editors, Suryadevara V. Babu ... [et al.]
Creator: Babu, Suryadevara V. Cadien, Kenneth C. Yano, Hiroyuki Publisher: Materials Research Society (Date of publication: 2001)

Manifestation: Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|671

Register number:

Item identifier: 219170

Include supplements: No

Required role: Guest

Acquired at: May 15, 2002

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:43:19 +0900

Updated at: Wed, 03 Dec 2025 16:34:44 +0900