[M] Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.

editors, Gregg S. Higashi ... [et al.]
Creator: Higashi, Gregg S. Publisher: Materials Research Society (Date of publication: 1997)

Manifestation: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|477

Register number:

Item identifier: 217571

Include supplements: No

Required role: Guest

Acquired at: January 23, 1998

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:51:17 +0900

Updated at: Wed, 03 Dec 2025 16:34:26 +0900