[M] Glow discharge processes : sputtering and plasma etching

Brian Chapman
Creator: Chapman, Brian N. Publisher: Wiley (Date of publication: 1980)

Manifestation: Glow discharge processes : sputtering and plasma etching

Shelf: Books 21 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 621.3|C|T-679

Register number:

Item identifier: 216238

Include supplements: No

Required role: Guest

Acquired at: January 13, 1986

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:54:59 +0900

Updated at: Mon, 15 Dec 2025 09:43:24 +0900