[M] Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

editors, Marc Heyns, Paul Mertens and Marc Meuris
Creator: International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS) Heyns, Marc Mertens, Paul Meuris, Marc Publisher: Scitec Publications (Date of publication: 2001)

Manifestation: Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

Shelf: Journal Archives 8 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 548.526|D|11420

Register number:

Item identifier: 218743

Include supplements: No

Required role: Guest

Acquired at: February 13, 2001

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 00:00:00 +0900

Updated at: Mon, 15 Dec 2025 09:52:45 +0900