資料の表示
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Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000 
editors, Marc Heyns, Paul Mertens and Marc Meuris
著者: International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS) Heyns, Marc Mertens, Paul Meuris, Marc 出版者: Scitec Publications
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冊子体
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| 言語: | English |
| ページ数と大きさ: | xiii, 321 p. ; 25 cm |
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ISBN: 9783908450573
ISSN: 10120394
NCID: BA7192768X
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| 注記: |
Includes bibliographical references and indexes |
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