[M] Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.

editors, Aditya Agarwal ... [et al.]
Creator: Agarwal, Aditya Publisher: Materials Research Society (Date of publication: 2001)

Manifestation: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|610

Register number:

Item identifier: 218934

Include supplements: No

Required role: Guest

Acquired at: August 09, 2001

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 00:00:12 +0900

Updated at: Wed, 03 Dec 2025 16:34:39 +0900