Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.

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editors, Aditya Agarwal ... [et al.]
Creator: Agarwal, Aditya Publisher: Materials Research Society (Date of publication: 2001)

Series statement:	Materials Research Society symposium proceedings v. 610 (ISSN: 02729172)
Form:	Volume
Language:	English
Physical description:	1 v. ; 24 cm
Subject:
Classification:	UDC: MRS
Tag:
Identifier:	ISBN: 9781558995185 ISSN: 02729172 NCID: BA52750594
Abstract:
Note:	Includes bibliographical references and indexes

Item identifier	Library	Shelf	Call number	Circulation status
218934	Namiki	Journal Archives 60	MRS\|P\|610	Available On Shelf

Namiki
Journal Archives 60
Available On Shelf

MRS

610