[M] Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

editors, Duane S. Boning ... [et al.]
Creator: Boning, Duane S. Devriendt, Katia Oliver, Michael R. Stein, David J. Publisher: Materials Research Society (Date of publication: 2003)

Manifestation: Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|767

Register number:

Item identifier: 219522

Include supplements: No

Required role: Guest

Acquired at: January 28, 2004

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 00:01:23 +0900

Updated at: Wed, 03 Dec 2025 16:34:53 +0900