Showing Manifestation
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Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. 
editors, Duane S. Boning ... [et al.]
Creator: Boning, Duane S. Devriendt, Katia Oliver, Michael R. Stein, David J. Publisher: Materials Research Society (Date of publication: 2003)
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Volume
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| Language: | English |
| Physical description: | xi, 348 p. ; 24 cm |
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ISBN: 9781558997042
NCID: BA65410307
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 219522 | Namiki |
Journal Archives 60 
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MRS|P|767 | Available On Shelf |