[M] Journal of Vacuum Science & Technology Vol.15 No.3-6 / No.3 ; Proceedings of the 14th Symposium on Electron, Ion, and Photon Beam Technology, 25-27 May 1977 Rickey's Hyatt House Palo Alto, California / No.4 ; Proceedings of the 5th Annual Conference on the Physics of Compound Semiconductor Interfaces, 17-20 January 1978 Davidson Conference Center University of Southern California University Park Los Angeles, California / No.5 ; Proceedings of the AVS Symposium on Ion Implantation -- New Prospects for Materials Modification, 14 June 1978 T.J. Watson Research Center Yorktown Heights, New York Vol.15 No.3-6

Publisher: for The American Vacuum Society by the American Institute of Physics (Date of publication: 1978)

Manifestation: Journal of Vacuum Science & Technology Vol.15 No.3-6 / No.3 ; Proceedings of the 14th Symposium on Electron, Ion, and Photon Beam Technology, 25-27 May 1977 Rickey's Hyatt House Palo Alto, California / No.4 ; Proceedings of the 5th Annual Conference on the Physics of Compound Semiconductor Interfaces, 17-20 January 1978 Davidson Conference Center University of Southern California University Park Los Angeles, California / No.5 ; Proceedings of the AVS Symposium on Ion Implantation -- New Prospects for Materials Modification, 14 June 1978 T.J. Watson Research Center Yorktown Heights, New York Vol.15 No.3-6

Shelf: Other (Sengen)

Checkout type: 標準

Circulation status: Removed

Call number: |J|T-1367

Register number:

Item identifier: 120483

Include supplements: No

Required role: Guest

Acquired at: August 17, 1983

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 01:43:14 +0900

Updated at: Mon, 12 May 2025 10:04:49 +0900