[M] Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

editors, Peter Pichler ... [et al.]
Creator: Pichler, Peter Publisher: Materials Research Society (Date of publication: 2004)

Manifestation: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|810

Register number:

Item identifier: 219665

Include supplements: No

Required role: Guest

Acquired at: August 24, 2004

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 02:08:39 +0900

Updated at: Wed, 03 Dec 2025 16:34:58 +0900