[M] Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.

editors, Ashok Kumar ... [et al.]
Creator: Materials Research Society Kumar, Ashok Publisher: Materials Research Society (Date of publication: 2005)

Manifestation: Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|867

Register number:

Item identifier: 219785

Include supplements: No

Required role: Guest

Acquired at: August 25, 2005

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 02:16:10 +0900

Updated at: Wed, 03 Dec 2025 16:35:03 +0900