資料の表示
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Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A. 
editors, Ashok Kumar ... [et al.]
著者: Materials Research Society Kumar, Ashok 出版者: Materials Research Society (出版日: 2005)
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| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | xi, 302 p. ; 24 cm |
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ISBN: 9781558998209
NCID: BA73187551
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| 注記: |
Includes bibliographical references and indexes |
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