[M] Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

editors, Gerfield Zwicker ... [et al.]
Creator: Zwicker, Gerfield Materials Research Society. Spring Meeting Advances and Challenges in Chemical Mechanical Planarization Publisher: Materials Research Society (Date of publication: 2007)

Manifestation: Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|991

Register number:

Item identifier: 211018

Include supplements: No

Required role: Guest

Acquired at: December 05, 2007

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 02:34:45 +0900

Updated at: Wed, 03 Dec 2025 16:35:08 +0900