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[M] 異種機能デバイス集積化技術の基礎と応用 : MEMS, NEMS, センサ, CMOSLSIの融合 冊子体

Author: 益一哉, 年吉洋, 町田克之監修 Publisher: シーエムシー出版 (Date of publication: 2012-11)

Titlte alternative: Integration technology for heterogeneous advanced devices
Form: 冊子体 冊子体
Language: Japanese
Physical description: ix, 279p ; 27cm
Subject:
Classification:
Identifier: ISBN: 9784781305868
Abstract:

Note:

Item identifier Library Shelf Call number Circulation status
600058 Sengen Books 11 Picture 621.3|M Available On Shelf