[M] 異種機能デバイス集積化技術の基礎と応用 : MEMS, NEMS, センサ, CMOSLSIの融合

益一哉, 年吉洋, 町田克之監修
Creator: 益, 一哉 年吉, 洋 町田, 克之 Publisher: シーエムシー出版 (Date of publication: 2012-11)

• Detail

Titlte alternative:	Integration technology for heterogeneous advanced devices
Form:	Volume
Language:	Japanese
Physical description:	ix, 279p ; 27cm
Subject:
Classification:	UDC: 621.3
Tag:
Identifier:	ISBN: 9784781305868
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
600058	Sengen	Books 11	621.3|M	Available On Shelf

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