[M] 異種機能デバイス集積化技術の基礎と応用 : MEMS,NEMS,センサ,CMOSLSIの融合

益一哉, 年吉洋, 町田克之監修
Creator: 益, 一哉 年吉, 洋 町田, 克之 Publisher: シーエムシー出版 (Date of publication: 2012-11)

• Detail

Titlte alternative:	Integration technology for heterogeneous advanced devices : basics and applications//High technology information
Series statement:	新材料・新素材シリーズ
Form:	Volume
Language:	Japanese
Physical description:	ix, 279p ; 27cm
Subject:
Classification:	UDC: 621.3
Tag:
Identifier:	ISBN: 9784781305868 NCID: BB1082106X
Abstract:
Note:	参考文献あり

Item identifier	Library	Shelf	Call number	Circulation status
600058	Namiki	Books 21	621.3|M	Available On Shelf

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