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[M] Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 29 1-3
(Date of publication: 2011)
Periodical: | Journal of Vacuum Science & Technology B |
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Number: | Volume number: 29 Issue number: 1-3 |
Form: | Volume |
Language: | English |
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Identifier: | ISSN: 0734211X |
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Item identifier | Library | Shelf | Call number | Circulation status |
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134801 | Sengen | Journal Archives |
Available On Shelf Not For Loan |