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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 29 1-3 
(Date of publication: 2011)
| Periodical: | Journal of Vacuum Science & Technology B |
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| Number: | Volume number: 29 Issue number: 1-3 |
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Volume
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| Language: | English |
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| Identifier: | ISSN: 0734211X |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 134801 | Namiki |
Journal Archives 27 
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Available On Shelf Not For Loan |
