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[M] Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 29 1-3 Volume


(Date of publication: 2011)

Periodical: Journal of Vacuum Science & Technology B
Edition:
Number: Volume number: 29 Issue number: 1-3
Form: Volume Volume
Language: English
Physical description:
Subject:
Classification:
Tag:
Identifier: ISSN: 0734211X
Abstract:

Note:

Item identifier Library Shelf Call number Circulation status
134801 Sengen Journal Archives Picture Available On Shelf
Not For Loan