資料の表示
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Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989 v. 1 
edited by K. Sumino
著者: International Conference on the Science and Technology of Defect Control in Semiconductors 角野, 浩二 協力者・編者: International Conference on the Science and Technology of Defect Control in Semiconductors 出版者: North-Holland Distributors for the U.S. and Canada, Elsevier Science Pub. (出版日: 1990)
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| 巻号: | 巻: v. 1 |
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冊子体
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| 言語: | English |
| ページ数と大きさ: | 1 v. ; 27 cm |
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ISBN: 9780444884299
NCID: BA11471035
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| 注記: |
Includes bibliographical references and index |
