資料の表示
[M] Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989 Volume I
協力者・編者: International Conference on the Science and Technology of Defect Control in Semiconductors 出版者: North-Holland
(出版日: 1990)
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巻号: | 巻: Volume I |
形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 1 v. ; 27 cm |
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識別子: | ISBN: 9780444884299 |
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