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[M] Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989 Volume II
edited by K. Sumino
Creator: International Conference on the Science and Technology of Defect Control Publisher: North-Holland
(Date of publication: 1990)
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Number: | Volume number: Volume II |
Form: | Volume |
Language: | English |
Physical description: | 1 v. ; 27 cm |
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Identifier: | ISBN: 9780444884299 |
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