[M] Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989 v. 2

edited by K. Sumino
Creator: International Conference on the Science and Technology of Defect Control in Semiconductors 角野, 浩二 Publisher: North-Holland Distributors for the U.S. and Canada, Elsevier Science Pub. (Date of publication: 1990)

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Edition:
Number:	Volume number: v. 2
Form:	Volume
Language:	English
Physical description:	1 v. ; 27 cm
Subject:
Classification:
Tag:
Identifier:	ISBN: 9780444884299 NCID: BA11471035
Abstract:
Note:	Includes bibliographical references and index

Item identifier	Library	Shelf	Call number	Circulation status
600119	Namiki	Books 22	621.315|S|2	Available On Shelf

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