資料の表示
[M] Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989 Volume II
edited by K. Sumino
著者: International Conference on the Science and Technology of Defect Control 出版者: North-Holland
(出版日: 1990)